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1. Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles (...)

   http://duke.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV3dS8MwEA9TH9QHP6bgN3nwSei6Nm3TwBiMuuFEEN1E9KWkbcJ8mMrWPfgn-F97l7ZjEwb6mqRHONLc73K_uyPk0g_gAtDIbpAJs7xQeVYYKo2chsxJpZeECp8GnsPbF_fhMexFNWKviOC7ji1TUP5IjQHAqUlDJIjg2RrZcAOwpIiFosE8bIDW0sBGwS2P-0GVsrNKDJqkdLpgUHq75LVKyzFs6kbBJineFZZo1gv1Gv-66z2yU8JM2inOxT6pqfc62Yyq7m51sr1QiPCAfPerqhEZ7U9NUtYYPm-N2p0c05bpnQRoTq9VxfFq2aO2_Wsax2g3N-RMOph9qkn6hZw7CrgYdqKkNTBNd-B-RcnLwuiHpsO3e_eQPPW6w-jGKps0WNIRPLe4Lz3NkZnlcyl94coUnBzuJZnwEP45zYwzkWjGXZalKtAy8XUzAyDHm5IFkh0RKjOGZQuVE2gN7joPlVTgmAYu-EtIzTomV6DPuPy7prEJnLtOjINzJcelkk_-s_iUbAECEoZ_K87Iej6ZqfOiL8SFOVo_vEnPgA

   by Saare, Holger; Parsons, Gregory N and Song, Seung Keun

   Chemistry Of Materials, Volume 31, Issue 13, pp. 4793 - 4804

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2. ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties (...)

   http://duke.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV3bSsNAEF28IPjiHaw35kHwKbbZ9LKVUijVKKJYb4i-hE2yoaJGMSniWz_BD1Dw2_olzmwu2gcV9DGwOyS7OztnNmfPMLZeqeIGEBC7QbqWURaqbAihAuI0-KYny65QdDRwIfYv-fGJsNtfbvEn-hD5gRt5ht6vycGlGxU_RUMfooh0gzCgUdgeZeOI7Cu4xscPT-zzg2w3Jr0qnXQhcjdIXioTbizx4rCF4cD0iTZzzMrToGNPs5vsdTXjejNhnCRnD0NU7EzT8T9fNsOmUmwKrWQxzbIRFc6xCc0R9aJ59n4VHgHV-QT7-vYugl3K4MF9hg4i8Ds56L_shF1NKIBGt9mK6b4zHEjE9LCtMnJYo9htbsGhjPXKhw79C3gkUVe4uI7Jtgx9OOrFVEUUEJzCoP_6szXsGPr3T4P-2wI7s3fO2ntGWuDB8CzMc4xaFfMZH0EO4oaA-8I3uYcT5lomL3kyQGxTN0kxT9VLqq5MEZCYIGaIrutZylfWIgPpW6R4qMxqEGCmXxNKKsxpqxxTLWJ1FZiRzarjparnVHzj1kn0mrlDo-3ko11gG3n7h0Tv49uWK9kicVK_jxwqNF9DxMMrBcb1HP9ixemcnrbyp6W_dFpmk5wOATSdaIWNxY89tZrUtlhLveEDOIAO4w

   by Perrotta, Alberto; Leising, Günther; Coclite, Anna Maria and Pilz, Julian

   Physica Status Solidi. A, Applications And Materials Science, Volume 217, Issue 8.

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3. Transition Metal Dichalcogenide TiS2 Prepared by Hybrid Atomic Layer (...)

   http://duke.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV1Lb9QwELZKL8ABQUGi5aFRxQnJbOy8nKqqtEpZLWgrASminCLHnigrwRZldyvtj-1_YSabbDn0wCWKHSuvsT3fjL8ZC_EuTmgCqJndYKtQRgYjaQzWzGnwytmoMsiugR_m80_99ZuZ5HsChliYhhBnP_fzuQy6hG0BGeUPTMKUPXWV71YJWDl2KDFLZZTGyRCho9XIOhJZg78J9mH7QTtOlJ6xBnJLOjad1zTstcjkqXjSwz8Yb-X1TOzh4kA8zIdd1w7E438SBD4Xt50q6VhVcIGEk-Gcae6_3DXJfe4RLueFhi8tdjxyqDYw3XAIFpw2Z-MVBxzDzBKohnMc2Fmno-ZsdDFsissN72txcncHLsoZc4vgE70L2fJLYO8tlaCYr9ZQbBauaa_Zpw5XsrUb6MmJYBce7h5VrNvaOoTd174Q3ycfL_Op7DdkkFYHZiUrQhOBi2Ie6ZXOCMtVZL4pb6qgQpt6Ql-EH6xyGjnfaFaHmU_psvax93Fkw5cCrA85RSGqpK7JNE8NWiQjNNFkGzEN61C8JxmV_Uhalt0iuVYlV-4EWvYCPRTH9M_LP9vEHCWnyp6OZyXXDR3nRh39T6NX4pHmwAbFwUqvxf6qXeOb7QYRb7tOR8dxXvwFc_TVPQ

   by Roussel, Hervé; Richard, Marie-Ingrid; Rapenne, Laetitia; Khrouz, Lhoussain; Ciatto, Gianluca; Gauthier, Nicolas; Abi Younes, Petros; Quadrelli, Elsje Alessandra; Renevier, Hubert; Schneider, Nathanaelle; et al.

   Chemistry Of Materials, Volume 34, Issue 24, pp. 10885 - 10901

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